{"product_id":"ion-implantation-science-and-technology-2010","title":"Ion Implantation: Science and Technology (2010)","description":"\u003cp\u003eA Textbook about Ion Implantation in the Semiconductor Industry (Click on \"Preview\" below for extended details).\u003c\/p\u003e\n\n\u003cp\u003eThe textbook covers both traditional ion implantation and also the current science problems and applications in CMOS technology. The chapters of the book include: \u003cbr\u003e\n-History of Integrated Circuits \u0026amp; Ion Implantation \u003cbr\u003e\n-Ion Implantation and Current and Future CMOS ICs  \u003cbr\u003e\n-Shallow Junctions Ð Problems and Solutions  \u003cbr\u003e\n-Current Trends in Ion Implanters  \u003cbr\u003e\n-Metrology of Ion Implantation  \u003cbr\u003e\n-Radiation Damage of Silicon\u003c\/p\u003e   \n\n\u003cp\u003e-Annealing of Radiation Damage in Silicon \u003cbr\u003e\n-SOI Wafers Ð Current \u0026amp; Future Directions \u003cbr\u003e\n-Development of Cluster Beam Technology \u003cbr\u003e\n-Ion Implanter Concepts \u003cbr\u003e\n-Source Physics and Maintenance \u003cbr\u003e\n-End Station Problems Ð Dosimetry, Contamination, Charging and Cooling \u003cbr\u003e\n-Safety in Ion Implantation \u003cbr\u003e\n-New Directions in Ion Implantation \u0026amp; Plasma Doping \u003cbr\u003e\n-Shallow Junctions (Cluster beams, TED Inhibitors, SOI) \u003cbr\u003e\n-Non-Silicon Semiconductors with SOI Wafers\u003c\/p\u003e","brand":"BooksWholesale","offers":[{"title":"Hardcover","offer_id":44275924467873,"sku":"uft1949","price":89.62,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0462\/1120\/3233\/files\/1eppkj6j-front-shortedge-384.jpg?v=1714092003","url":"https:\/\/bookswholesale.myshopify.com\/products\/ion-implantation-science-and-technology-2010","provider":"BooksWholesale","version":"1.0","type":"link"}